An endoscopie imaging system based on a two-dimensional CMUT array: real-time imaging results

Real-time catheter-based ultrasound imaging tools are needed for diagnosis and image-guided procedures. The continued development of these tools is partially limited by the difficulty of fabricating two-dimensional array geometries of piezoelectric transducers. Using capacitive micromachined ultrasonic transducer (CMUT) technology, transducer arrays with widely varying geometries, high frequencies, and wide bandwidths can be fabricated. A volumetric ultrasound imaging system based on a two-dimensional, 16×l6-element, CMUT array is presented. Transducer arrays with operating frequencies ranging from 3 MHz to 7.5 MHz were fabricated for this system. The transducer array including DC bias pads measures 4 mm by 4.7 mm. The transducer elements are connected to flip-chip bond pads on the array back side with 400-μm long through-wafer interconnects. The array is flip-chip bonded to a custom-designed integrated circuit (IC) that comprises the front-end electronics. Integrating the front-end electronics with the transducer array reduces the effects of cable capacitance on the transducer's performance and provides a compact means of connecting to the transducer elements. The front-end IC provides a 27-V pulser and 10-MHz bandwidth amplifier for each element of the array. An FPGA-based data acquisition system is used for control and data acquisition. Output pressure of 230 kPa was measured for the integrated device. A receive sensitivity of 125 mV/kPa was measured at the output of the amplifier. Amplifier output noise at 5 Mhz is 112 nV/√Hz. Volumetric images of a wire phantom and vessel phantom are presented. Volumetric data for a wire phantom was acquired in real-time at 30 frames per second.Publisher's Versio

Optimization of operating frequency of acoustic transducers for obtaining maximum temperature in HIFU based therapeutic ablation

High intensity Focus Ultrasound therapy relies on acoustic power absorbed by tissue. Acoustic absorption is a function of frequency: while a relatively lower frequency allows the beam to propagate farther in the tissue, the absorption, and, hence, the heat generated at the focal point is poor. At higher frequencies, on the other hand, tissue at the focal point is capable of absorbing most of the incoming acoustic energy, but loss along the propagation path significantly reduces the strength of the received signal. One figure of merit for finding the optimal frequency is the spatial peak of the acoustic power absorption density. In this paper, we analyze the same problem with the figure of merit taken as the peak temperature at the focal point and show that this may lead to a different frequency at which this value is maximized

Fabrication of High-Efficiency CMUTs With Reduced Parasitics Using Embedded Metallic Layers

The transmit and receive sensitivity of the capacitive micromachined ultrasonic transducer (CMUT) is proportional to the active device capacitance formed by the vacuum gap of the device, and an insulation layer between the gap and the device electrode. In the sacrificial release process of CMUT fabrication, this insulation layer cannot be made arbitrarily thin due to conformality issues. In this paper, we propose and prove the applicability of a micromachining technique by which metallic sacrificial islands are embedded inside grooves etched on the substrate, yielding topology free surfaces. This obviates the conformality requirement, and enables the growth of a thinner insulation layer which reduces the effective gap height, and, hence, improves sensitivity. Embedded metalic layers, which provide a flat surface for subsequent process steps, have also been used as the back electrode of the CMUT, which facilitated the manufacturing of devices with reduced stray capacitance on thermally oxidized wafers. CMUT devices were fabricated using the proposed technique, and their parameters were measured to justify the performance improvement. While the dc bias requirement is reduced by 19%, the output sensitivity of the device is 10% higher than that of the conventional CMUT, and spurious capacitance is decreased by 70%.This work was supported by The Scientific and Technological Research Council of Turkey under Grant 112E048. This work was presented at the IEEE Sensors Conference 2015. The associate editor coordinating the review of this paper and approving it for publication was Dr. Rosario Morello

Frequency Optimization in High Intensity Focused Ultrasound

IEEE International Ultrasonics Symposium (IUS) (2014 : Chicago, IL)In high intensity focused ultrasound (HIFU) the choice of transducer frequency depends on the target depth and tissue type. At high frequencies attenuation does not permit enough acoustical power to be transmitted to the target whereas at low frequencies the transmitted power is not absorbed efficiently. Hence, there exists an optimum frequency at which the power deposited at the target is maximum. In this study, we verified this relation experimentally using MR compatible focused transducers, ex-vivo tissue samples and magnetic resonance (MR) thermometry

Forward-viewing CMUT arrays for medical Imaging

PubMed ID: 15301009This paper reports the design and testing of forward-viewing annular arrays fabricated using capacitive micromachined ultrasonic transducer (CMUT) technology. Recent research studies have shown that CMUTs have broad frequency bandwidth and high-transduction efficiency. One- and two-dimensional CMUT arrays of various sizes already have been fabricated, and their viability for medical imaging applications has been demonstrated. We fabricated 64-element, forward-viewing annular arrays using the standard CMUT fabrication process and carried out experiments to measure the operating frequency, bandwidth, and transmit/receive efficiency of the array elements. The annular array elements, designed for imaging applications in the 20 MHz range, had a resonance frequency of 13.5 MHz in air. The immersion pulse-echo data collected from a plane reflector showed that the devices operate in the 5-26 MHz range with a fractional bandwidth of 135%. The output pressure at the surface of the transducer was measured to be 24 kPa/V. These values translate into a dynamic range of 131.5 dB for I-V excitation in 1-Hz bandwidth with a commercial low noise receiving circuitry. The designed, forward-viewing annular CMUT array is suitable for mounting on the front surface of a cylindrical catheter probe and can provide Doppler information for measurement of blood flow and guiding information for navigation through blood vessels in intravascular ultrasound imaging.Publisher's Versio

Coherent array imaging using phased subarrays. Part II: Simulations and experimental results

PubMed ID: 15742562The basic principles and theory of phased subarray (PSA) imaging imaging provides the flexibility of reducing I he number of front-end hardware channels between that of classical synthetic aperture (CSA) imaging-which uses only one element per firing event-and full-phased array (FPA,) imaging-which uses all elements for each firing. The performance of PSA generally ranges between that obtained by CSA and FPA using the same array, and depends on the amount of hardware complexity reduction. For the work described in this paper, we performed FPA, CSA, and PSA imaging of a resolution phantom using both simulated and experimental data from a 3-MHz, 3.2-cm, 128-element capacitive micromachined ultrasound transducer (CMUT) array. The simulated system point responses in the spatial and frequency domains are presented as a means of studying the effects of signal bandwidth, reconstruction filter size, and subsampling rate on the PSA system performance. The PSA and FPA sector-scanned images were reconstructed using the wideband experimental data with 80% fractional bandwidth, with seven 32-element subarrays used for PSA imaging. The measurements on the experimental sector images indicate that, at the transmit focal zone, the PSA method provides a 10% improvement in the 6-dB lateral resolution, and the axial point resolution of PSA imaging is identical to that of FPA imaging. The signal-to-noise ratio (SNR) of PSA image was 58.3 dB, 4.9 dB below that of the FPA image, and the contrast-to-noise ratio (CNR) is reduced by 10%. The simulated and experimental test results presented in this paper validate theoretical expectations and illustrate the flexibility of PSA imaging as a way to exchange SNR and frame rate for simplified front-end hardware.Publisher's Versio

Phased subarray imaging for low-cost, wideband coherent array imaging

The front-end hardware complexity of conventional full phased array (FPA) imaging is proportional to the number of array elements. Phased subarray (PSA) imaging has been proposed as a method of reducing the hardware complexity-and therefore system cost and size-while achieving near-FPA image quality. A new method is presented for designing the subarray-dependent interpolation filters suitable for wideband PSA imaging. The method was tested experimentally using pulse-echo data of a wire target phantom acquired using a 3.2-cm. 128-element capacitive micromachined ultrasonic transducer (CMUT) array with 85% fractional bandwidth at 3 MHz. A specific PSA configuration using seven 32-element subarrays was compared to FPA imaging, representing a 4-fold reduction in front-end hardware complexity and a 43% decrease in frame rate. For targets near the fixed transmit focal distance, the mean 6-dB lateral resolution was identical to that of FPA, the axial resolution improved by 4%, and the SNR decreased by 5 dB. Measurements were repeated for 10 different PSA configurations with subarray sizes ranging from 4 to 60. The lateral and axial resolutions did not vary significantly with subarray size; both the SNR and contrast-to-noise ratio (CNR) improved with increased subarray size.Publisher's Versio

Integration of 2D CMUT arrays with front-end electronics for volumetric ultrasound imaging

PubMed ID: 18334340For three-dimensional (3D) ultrasound imaging, connecting elements of a two-dimensional (2D) transducer array to the imaging system's front-end electronics is a challenge because of the large number of array elements and the small element size. To compactly connect the transducer array with electronics, we flip-chip bond a 2D 16 x 16-element capacitive micromachined ultrasonic transducer (CMUT) array to a custom-designed integrated circuit (IC). Through-wafer interconnects are used to connect the CMUT elements on the top side of the array with flip-chip bond pads on the back side. The IC provides a 25-V pulser and a transimpedance preamplifier to each element of the array. For each of three characterized devices, the element yield is excellent (99 to 100% of the elements are functional). Center frequencies range from 2.6 MHz to 5.1 MHz. For pulse-echo operation, the average -6-dB fractional bandwidth is as high as 125%. Transmit pressures normalized to the face of the transducer are as high as 339 kPa and input-referred receiver noise is typically 1.2 to 2.1 mPa/root Hz. The flip-chip bonded devices were used to acquire 3D synthetic aperture images of a wire-target phantom. Combining the transducer array and IC, as shown in this paper, allows for better utilization of large arrays, improves receive sensitivity, and may lead to new imaging techniques that depend on transducer arrays that are closely coupled to IC electronics.Publisher's Versio

Volumetric imaging using 2D capacitive micromachined ultrasonic transducer arrays (CMUTs): Initial results

This paper presents the first volumetric images obtained using a 2D CMUT array with through-wafer via interconnects. An 8×16-element portion of a 32×64-element array flip-chip bonded onto a glass fanout chip was used in the experiments. This study experimentally demonstrates that 2D CMUT arrays can be fabricated with high yield using silicon micromachining processes, individual electrical connections can be provided using through-wafer interconnects, and the flip-chip bonding technique can be used to integrate the dense 2D arrays with electronic circuits for practical imaging applications.Publisher's Versio

Volumetric ultrasound imaging using 2-D CMUT arrays

PubMed ID: 14682642Recently, capacitive micromachined ultrasonic transducers (CMUTs) have emerged as a candidate to overcome the difficulties in the realization of 2-D arrays for real-time 3-D imaging. In this paper, we present the first volumetric images obtained using a 2-D CMUT array. We have fabricated a 128 x 128-element 2-D CMUT array with through-wafer via interconnects and a 420-mum element pitch. As an experimental prototype, a 32 x 64-element portion of the 128 X 128-element array was diced and flip-chip bonded onto a glass fanout chip. This chip provides individual leads from a central 16 X 16-element portion of the array to surrounding bondpads. An 8 x 16-element poition of the array was used in the experiments along with a 128-channel data acquisition system. For imaging phantoms, we used a 2.37-mm diameter steel sphere located 10 mm from the array center and two 12-mm-thick Plexiglas plates located 20 mm and 60 mm from the array. A 4 X 4 group of elements in the middle of the 8 X 16-element array was used in transmit, and the remaining elements were used to receive the echo signals. The echo signal obtained from the spherical target presented a frequency spectrum centered at 4.37 MHz with a 100% fractional bandwidth, whereas the frequency spectrum for the echo signal from the parallel plate phantom was centered at 3.44 MHz with a 91% fractional bandwidth. The images were reconstructed by using RF beamforming and synthetic phased array approaches and visualized by surface rendering and multiplanar slicing techniques. The image of the spherical target has been used to approximate the point spread function of the system and is compared with theoretical expectations. This study experimentally demonstrates that 2-D CMUT arrays can be fabricated with high yield using silicon IC-fabrication processes, individual electrical connections can be provided using through-wafer vias, and flip-chip bonding can be used to integrate these dense 2-D arrays with electronic circuits for practical 3-D imaging applications.Publisher's Versio